رشد بلور و ارزیابی سیلیکون برای VLSI و ULSI ۲۰۱۴
Crystal Growth and Evaluation of Silicon for VLSI and ULSI 2014

1. Front Cover

2. Dedication

3. Contents

4. Preface

5. About the Author

6. Chapter 1 Introduction

7. Chapter 2 Silicon: The Key Material for Integrated Circuit Fabrication Technology

8. Chapter 3 Importance of Single Crystals for Integrated Circuit Fabrication

9. Chapter 4 Different Techniques for Growing Single-Crystal Silicon

10. Chapter 5 From Silicon Ingots to Silicon Wafers

11. Chapter 6 Evaluation of Silicon Wafers

12. Chapter 7 Resistivity and Impurity Concentration Mapping of Silicon Wafers

13. Chapter 8 Impurities in Silicon Wafers

14. Chapter 9 Defects in Silicon Wafers

15. Chapter 10 Silicon Wafer Preparation for VLSI and ULSI Processing

16. Chapter 11 Packing of Silicon Wafers

17. Back Cover